GTIIT-STU optics seminar

Title: Advances in large-scale micro-and nano manufacturing and the applications

Speaker: Wenbin Huang

SVG Tech Group, Soochow University

Abstract

The large-area micro-nano manufacturing technology serves as a foundational technology in fields such as information electronics, new energy, new materials, aerospace, and biomedicine. It has been validated in applications including telecommunications, autonomous vehicles, and AR displays. The SVG Tech Group has developed a large-area micro-nano manufacturing platform based on digital light fields, achieving breakthroughs in key technologies for digital modulation and reconstruction of light fields. We have addressed challenges related to the processing of massive data (up to hundreds of terabytes) and the functionalization of micro-nano structures, proposing a network-coordinated 3D lithography operating mode and developing a large-area, high-precision direct-write lithography machine based on digital light fields. The world’s first 110-inch 3D computational lithography equipment is now operational in industrial settings, serving as a fundamental tool for cutting-edge research and innovation across multiple sectors. The report highlighted innovative applications of large-area micro-nano structures, empowering advancements in novel displays, energy-saving materials, optical phased arrays, and polarization imaging.