Focused Ion Beam – Scanning Electron Microscope

Introduction

Model:

Thermo Scientific Helios 5 UC

Address:

RB05

Electron optics:

  • Electron beam current range: 0.8 pA – 100 nA

  • Accelerating voltage range: 350 V – 30 kV

  • Highest resolution: 0.6 nm at 15 kV

Ion optics:

  • Ion beam current range: 1 pA – 100 nA

  • Accelerating voltage range: 500 V – 30 kV

  • Highest resolution: 4.0 nm at 30 kV 

Detectors:

ICD, MD, TLD, ETD, ICE, DBS, STEM, EDS, EBSD

Key features:

  • High-current UC+ Technology

  • Precise Sample Navigation

  • MultiChem-GIS

  • Fully Automated

Techniques:

  • TEM Sample Preparation

  • Cross Section Preparation

  • 3D Materials Characterization
  • APT Sample Preparation

  • Micro-nano Processing

  • EDS/EBSD Analysis

Contact: Wenjing Zhang

Tel: 0754-88077169

Email: wenjing.zhang@gtiit.edu.cn

Gallery