Introduction
Model:
Zeiss Gemini 450
Address:
RB02
Electron optics:
- Accelerating voltage range: 0.02 kV – 30 kV
- Electron beam current range: 3 pA – 40 pA
Highest resolution: 0.7 nm at 15 kV
Detectors:
Inlens SE, SE2, ESB, BSD, VPBSD, VPSE, STEM, EDS, EBSD
Main Functions:
- High resolution morphology observation
- Failure analysis of semiconductor materials
- Analysis of material element composition
- Analysis of material crystal structure
Contact: Jingfang Shen
Tel: 0754-88077154
Email: jingfang.shen@gtiit.edu.cn
