Scanning Electron Microscope

Introduction

Model:

Zeiss Gemini 450

Address:

RB02

Electron optics:

  • Accelerating voltage range: 0.02 kV – 30 kV
  • Electron beam current range: 3 pA – 40 pA
  • Highest resolution: 0.7 nm at 15 kV

Detectors:

Inlens SE,  SE2, ESB, BSD, VPBSD, VPSE, STEM, EDS, EBSD

Main Functions:

  • High resolution morphology observation
  • Failure analysis of semiconductor materials
  • Analysis of material element composition
  • Analysis of material crystal structure

Contact: Jingfang Shen

Tel: 0754-88077154

Email: jingfang.shen@gtiit.edu.cn

Copyright © 2020 Electron Microscopy Center of Guangdong Technion Israel Institute of Technology